Chemical Vapour Deposition : An Integrated Engineering Design for Advanced Materials - Yan, Xiu-Tian.; Xu, Yongdong; SpringerLink (Online service) (London : Springer London : Imprint: Springer, 2010)
to Chemical Vapour Deposition -- Physical Fundamentals of Chemical Vapour Deposition -- Chemical Vapour Deposition Systems Design -- Thermodynamics and Kinetics of Chemical Vapour Deposition -- Chemical Vapour Infiltration -- Microstructure Evolution and Process Control.
Keywords: Manufactures; Materials science; Manufacturing, Machines, Tools, Processes; Materials Science, general