Helium Ion Microscopy : Principles and Applications - Joy, David C.; SpringerLink (Online service) (New York, NY : Springer New York : Imprint: Springer, 2013)
Chapter 1: Introduction to Helium Ion Microscopy -- Chapter 2: Microscopy with Ions  - A brief history -- Chapter 3: Operating the Helium Ion Microscope -- Chapter 4: Ion -Solid  Interactions  and Image Formation -- Chapter 5: Charging and  Damage -- Chapter 6: Microanalysis with the HIM -- Chapter 7: Ion Generated Damage -- Chapter 8: Working with other Ion beams -- Chapter 9: Patterning and Nanofabrication -- Conclusion -- Bibliography -- Appendix: iSE Yields,  and IONiSE  parameters for  He+ excitation  of Elements and Compounds -- Index.
Keywords: Materials science; Spectroscopy; Microscopy; Nanotechnology; Nanoscale science; Nanoscience; Nanostructures; Characterization and Evaluation of Materials; Spectroscopy and Microscopy; Spectroscopy/Spectrometry.; Nanotechnology; Nanoscale Science and Technology