Ion Beams in Materials Processing and Analysis - Schmidt, Bernd; Wetzig, Klaus; SpringerLink (Online service) (Vienna : Springer Vienna : Imprint: Springer, 2013)
Preface -- 1. Introduction -- 2. Ion- Solid Interactions -- 2.1 Fundamental Principles -- 2.2 Binary Elastic Collisions -- 2.3 Ion Stopping -- 2.4 Ion Channeling -- 2.5 Ion Induced Target Modifications -- 3. Ion Beam Technology -- 3.1 Principles of Ion Accelerators -- 3.2 Ion Sources -- 3.3 Ion Acceleration -- 3.4 Ion Beam Handling -- 3.5 Ion Implantation Systems -- 3.6 Electrostatic Ion Accelerator Systems -- 3.7 Focused Ion Beam Systems -- 4. Materials Processing -- 4.1 Ion Irradiation Effects in Crystalline Materials -- 4.2 Ion Implantation into Semiconductors -- 4.3 Ion Beam Synthesis of New Phases in Solids -- 4.4 Ion Beam Mixing of Interfaces -- 4.5 Ion Beam Slicing of Thin Layers (Smart-Cut for SOI and Solar Cells) -- 4.6 Ion Beam Erosion, Sputtering and Surface Patterning (Ripples and Dots) -- 4.7 Ion Beam Shaping of Nanomaterials -- 4.8 Ion Beam Processing of other Materials -- 5. Ion Beam Preparation of Materials -- 5.1 Removal of Target Atoms by Sputtering -- 5.2 Effects on Sputtering Yield -- 5.3 Preparation Steps by Ion Beam Irradiation -- 5.4 Focus Ion Beam (FIB) Preparation -- 6. Ion Beam Analysis by Ion Beams -- 6.1 Introduction -- 6.2 Ion Beam Analytical Techniques - a Survey -- 6.3 Ion Beam Scattering Techniques -- 6.4 Ion Beam Induced Photon Emission -- 6.5 Nuclear Reaction Analysis (NRA) -- 6.6 Ion Beam Induced Electron and Light Emission -- 6.7 Secondary Ion Emission -- 6.8 Ion Beam Imaging Techniques -- 7. Special Ion Beam Applications in Materials Analysis Problems -- 7.1 Functional Thin Films and Layers -- 7.2 Ion Beam Analysis in Art and Archeometry -- 7.3 Special Applications in Life Sciences -- Index.
Keywords: Materials-Surfaces.; Thin films; Atoms; Physics; Surfaces (Physics).; Interfaces (Physical sciences).; Surfaces and Interfaces, Thin Films; Atomic, Molecular, Optical and Plasma Physics; Surface and Interface Science, Thin Films