APA Citation

Adams, T. M., & Layton, R. A. (2010). Introductory MEMS: Fabrication and Applications (1st ed. 2010.). New York, NY: Springer US : Imprint: Springer.

Chicago Style Citation

Adams, Thomas M., and Richard A. Layton. Introductory MEMS: Fabrication and Applications. 1st ed. 2010. New York, NY: Springer US : Imprint: Springer, 2010.

MLA Citation

Adams, Thomas M., and Richard A. Layton. Introductory MEMS: Fabrication and Applications. 1st ed. 2010. New York, NY: Springer US : Imprint: Springer, 2010.

Warning: These citations may not always be 100% accurate.