Introductory MEMS : Fabrication and Applications - Adams, Thomas M.; Layton, Richard A.; SpringerLink (Online service) (New York, NY : Springer US : Imprint: Springer, 2010)
Fabrication -- The substrate and adding material to it -- Creating and transferring patterns#x2014;Photolithography -- Creating structures#x2014;Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers#x2014;An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories.
Keywords: Electronics; Microelectronics; Electronic circuits; Mechanics; Materials-Surfaces.; Thin films; Mechanics, Applied; Electronics and Microelectronics, Instrumentation; Circuits and Systems; Classical Mechanics; Surfaces and Interfaces, Thin Films; Solid Mechanics