Multilayer Integrated Film Bulk Acoustic Resonators - Zhang, Yafei; Chen, Da.; SpringerLink (Online service) (Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013)
Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR.
Keywords: Nanotechnology; Materials-Surfaces.; Thin films; Solid state physics; Nanotechnology and Microengineering; Surfaces and Interfaces, Thin Films; Solid State Physics