Nanoimprint Lithography: An Enabling Process for Nanofabrication - Zhou, Weimin; SpringerLink (Online service) (Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013)
Principles and statues of nanoimprint lithography -- Stamp Fabrication -- stamp surface treatment -- Nanoimprint lithography resists -- Nanoimprint lithography process -- Modeling and Simulation of NIL -- Application of NIL in Light emitting Diodes -- Application of NIL in memory devices -- Application of NIL in solar cell.
Keywords: Nanotechnology; Optical materials; Electronic materials; Nanochemistry; Nanotechnology and Microengineering; Optical and Electronic Materials; Nanotechnology; Nanochemistry