Precision Nanometrology : Sensors and Measuring Systems for Nanomanufacturing - Gao, Wei.; SpringerLink (Online service) (London : Springer London : Imprint: Springer, 2010)
Angle Sensor for Measurement of Surface Slope and Tilt Motion -- Laser Autocollimator for Measurement of Multi-axis Tilt Motion -- Surface Encoder for Measurement of In-plane Motion -- Grating Encoder for Measurement of In-plane and Out-of-plane Motion -- Scanning Multi-probe System for Measurement of Roundness -- Scanning Error Separation System for Measurement of Straightness -- Scanning Micro-stylus System for Measurement of Micro-aspherics -- Large Area Scanning Probe Microscope for Micro-textured Surfaces -- Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures -- Scanning Image-sensor System for Measurement of Micro-dimensions.
Keywords: Nanotechnology; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films; Control engineering; Robotics; Mechatronics; Manufactures; Physical measurements; Measurement .; Nanotechnology and Microengineering; Surface and Interface Science, Thin Films; Control, Robotics, Mechatronics; Manufacturing, Machines, Tools, Processes; Measurement Science and Instrumentation; Nanotechnology