RF MEMS Switches and Integrated Switching Circuits - Liu, Ai-Qun.; SpringerLink (Online service) (New York, NY : Springer US : Imprint: Springer, 2010)
Lateral Series Switches -- Capacitive Shunt Switches -- Coplanar Waveguide Transmission Line -- Single-Pole-Multi-Throw Switching Circuits -- Tunable Electromagnetic Band Gap Bandstop Filter -- Tunable Electromagnetic Bandpass Filter and Reconfigurable Circuit -- Capacitive Switching Bandpass Filters -- Substrate Transfer Process -- Surface Planarization Process.
Keywords: Electronic circuits; Mechanical engineering; Electronics; Microelectronics; Circuits and Systems; Mechanical Engineering; Electronics and Microelectronics, Instrumentation