El-Kareh, B. (2009). Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies (1st ed. 2009.). New York, NY: Springer US : Imprint: Springer.
Chicago Style CitationEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies. 1st ed. 2009. New York, NY: Springer US : Imprint: Springer, 2009.
MLA CitationEl-Kareh, Badih. Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies. 1st ed. 2009. New York, NY: Springer US : Imprint: Springer, 2009.
Warning: These citations may not always be 100% accurate.