Cita APA

Wasa, K., Kanno, I., Kotera, H., Adachi, H., Hata, T., Matsushima, T., . . . Tominaga, K. (2012). Handbook of sputter deposition technology: Fundamentals and applications for functional thin films, nanomaterials and MEMS (Second Edition.). Ámsterdam: William Andrew Publishing.

Citación estilo Chicago

Wasa, Kiyotaka,, Isaku Kanno, Hidetoshi Kotera, Hideaki Adachi, Tomonobu Hata, Tomoaki Matsushima, Tomoyoshi Motohiro, y Kikuo Tominaga. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nanomaterials and MEMS. Second Edition. Ámsterdam: William Andrew Publishing, 2012.

Cita MLA

Wasa, Kiyotaka,, et al. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nanomaterials and MEMS. Second Edition. Ámsterdam: William Andrew Publishing, 2012.