Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials and MEMS - Wasa, Kiyotaka,; Kanno, Isaku,; Kotera, Hidetoshi,; Adachi, Hideaki,; Hata, Tomonobu,; Matsushima, Tomoaki,; Motohiro, Tomoyoshi,; Tominaga, Kikuo, (William Andrew Publishing, 2012)
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