Into The Nano Era Moore's Law Beyond Planar Silicon CMOS - Huff, Howard; SpringerLink (Online service) (Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2009)
Historical Background -- Silicon: Child and Progenitor of Revolution -- The Economic Implications of Moore's Law -- State-of-the-Art -- Using Silicon to Understand Silicon -- Theory of Defects in Si: Past, Present, and Challenges -- Structural, Elemental, and Chemical Complex Defects in Silicon and Their Impact on Silicon Devices -- Surface and Interface Chemistry for Gate Stacks on Silicon -- Enhanced Carrier Mobility for Improved CMOS Performance -- Transistor Scaling to the Limit -- Future Directions -- Beyond CMOS Electronics: Self-Assembled Nanostructures -- Hybrid CMOS/Molecular Integrated Circuits -- Sublithographic Architecture: Shifting the Responsibility for Perfection -- Quantum Computing -- Afterwords -- Nano-Whatever: Do We Really Know Where We Are Heading? -- Silicon Forever! Really?.
Keywords: Nanotechnology; Electronics; Microelectronics; Optical materials; Electronic materials; Condensed matter; Nanotechnology; Electronics and Microelectronics, Instrumentation; Optical and Electronic Materials; Condensed Matter Physics