Franz, G. (2009). Low Pressure Plasmas and Microstructuring Technology (1st ed. 2009.). Berlin, Heidelberg: Springer Berlin Heidelberg : Imprint: Springer.
Chicago Style CitationFranz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. 1st ed. 2009. Berlin, Heidelberg: Springer Berlin Heidelberg : Imprint: Springer, 2009.
MLA CitationFranz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. 1st ed. 2009. Berlin, Heidelberg: Springer Berlin Heidelberg : Imprint: Springer, 2009.
Warning: These citations may not always be 100% accurate.