Low Pressure Plasmas and Microstructuring Technology - Franz, Gerhard; SpringerLink (Online service) (Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2009)
Collisions and cross sections -- The plasma -- DC discharges -- High-frequency discharges I -- High-frequency discharges II -- High-frequency discharges III -- Ion beam systems -- Plasma diagnostics -- Plasma deposition processes -- Plasma etch processes -- Etch Mechanisms -- Outlook -- Advanced Topics.
Keywords: Optical materials; Electronic materials; Electronics; Microelectronics; Materials-Surfaces.; Thin films; Atomic structure .; Molecular structure .; Optical and Electronic Materials; Electronics and Microelectronics, Instrumentation; Surfaces and Interfaces, Thin Films; Atomic/Molecular Structure and Spectra