Cita APA

Sherman, A., & Sherman, A. (1987). Chemical vapor deposition for microelectronics: Principles, technology, and applications. Park Ridge, N.J.: Noyes.

Citación estilo Chicago

Sherman, Arthur, y Arthur Sherman. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. Park Ridge, N.J.: Noyes, 1987.

Cita MLA

Sherman, Arthur, y Arthur Sherman. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. Park Ridge, N.J.: Noyes, 1987.