Chemical vapor deposition for microelectronics : principles, technology, and applications /
| Main Author: | |
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| Format: | Book |
| Language: | Spanish |
| Published: |
Park Ridge, N.J. :
Noyes,
c1987.
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| Series: | Materials Science and Process Technology Series
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| Subjects: |
| Physical Description: | xi, 215 páginas : ilustraciones |
|---|---|
| ISBN: | 0815511361 |