Grimmeiss, H., Kittler, M., & Richter, H. (1993). Gettering and defect engineering in semiconductor technology: Gadest '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt (Oder), Germany october 19-14, 1993. Suiza: Scitec.
Chicago Style CitationGrimmeiss, H.G., M. Kittler, and H. Richter. Gettering and Defect Engineering in Semiconductor Technology: Gadest '93 : Proceedings of the 5th International Autumn Meeting Held in Chossewitz, Near Frankfurt (Oder), Germany October 19-14, 1993. Suiza: Scitec, 1993.
MLA CitationGrimmeiss, H.G., M. Kittler, and H. Richter. Gettering and Defect Engineering in Semiconductor Technology: Gadest '93 : Proceedings of the 5th International Autumn Meeting Held in Chossewitz, Near Frankfurt (Oder), Germany October 19-14, 1993. Suiza: Scitec, 1993.