Gettering and defect engineering in semiconductor technology : gadest '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt (Oder), Germany october 19-14, 1993 /
| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Suiza :
Scitec,
c1993.
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| Series: | Solid State Phenomena ;
32-33) |
| Subjects: |
| Physical Description: | xvii, 630 páginas : ilustraciones |
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| ISBN: | 3908450004 |