Schuegraf, K. K. (1988). Handbook of thin-film deposition processes and techniques: Principles, methods, equipment, and applications. New Jersey: Noyes.
Chicago Style CitationSchuegraf, Klaus K. Handbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. New Jersey: Noyes, 1988.
MLA CitationSchuegraf, Klaus K. Handbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. New Jersey: Noyes, 1988.
Warning: These citations may not always be 100% accurate.