APA Citation

Wasa, K., Kitabatake, M., & Adachi, H. (2004). Thin film materials technology: Sputtering of compound materials. Norwich NY: W. Andrew.

Chicago Style Citation

Wasa, Kiyotaka, Makoto Kitabatake, and Hideaki Adachi. Thin Film Materials Technology: Sputtering of Compound Materials. Norwich NY: W. Andrew, 2004.

MLA Citation

Wasa, Kiyotaka, Makoto Kitabatake, and Hideaki Adachi. Thin Film Materials Technology: Sputtering of Compound Materials. Norwich NY: W. Andrew, 2004.

Warning: These citations may not always be 100% accurate.