Cuomo, J. J., Rossnagel, S. M., & Kaufman, H. R. (1989). Handbook of ion beam processing technology: Principles, deposition, film modification, and synthesis. Park Ridge, N.J.: Noyes.
Chicago Style CitationCuomo, Jerome J., Stephen M. Rossnagel, and Harold R. Kaufman. Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification, and Synthesis. Park Ridge, N.J.: Noyes, 1989.
MLA CitationCuomo, Jerome J., Stephen M. Rossnagel, and Harold R. Kaufman. Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification, and Synthesis. Park Ridge, N.J.: Noyes, 1989.
Warning: These citations may not always be 100% accurate.