APA Citation

(1964). Journal of vacuum science & technology: A, Vacuum, surfaces, and films. New York, New York: American Institute of Physics.

Chicago Style Citation

Journal of Vacuum Science & Technology: A, Vacuum, Surfaces, and Films. New York, New York: American Institute of Physics, 1964.

MLA Citation

Journal of Vacuum Science & Technology: A, Vacuum, Surfaces, and Films. New York, New York: American Institute of Physics, 1964.

Warning: These citations may not always be 100% accurate.