APA Citation

Burger, R. M., & Donovan, R. P. (1967). Fundamentals of silicon integrated device technology: Vol. I : oxidation, diffusion and epitaxy. New Jersey: Prentice-Hall.

Chicago Style Citation

Burger, R. M., and R. P. Donovan. Fundamentals of Silicon Integrated Device Technology: Vol. I : Oxidation, Diffusion and Epitaxy. New Jersey: Prentice-Hall, 1967.

MLA Citation

Burger, R. M., and R. P. Donovan. Fundamentals of Silicon Integrated Device Technology: Vol. I : Oxidation, Diffusion and Epitaxy. New Jersey: Prentice-Hall, 1967.

Warning: These citations may not always be 100% accurate.