Fundamentals of silicon integrated device technology: vol. I : oxidation, diffusion and epitaxy - Burger, R. M.; Donovan, R. P. (New Jersey : Prentice-Hall, 1967)
Properties of silica glass
Methods of oxide formation
Oxide properties
Application of oxides in silicon integrated devices
Diffusion theory
Theory of epitaxy
Keywords: Oxidación; Difusión; Epitaxy