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1
BioNanoFluidic MEMS /
Published 2008
“...MEMS Reference Shelf,...”
eBook
2
Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines /
Published 2010
“...MEMS Reference Shelf,...”
eBook
3
MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness /
by Acar, Cenk., Shkel, Andrei.
Published 2009
“...MEMS Reference Shelf,...”
Get full text
eBook
4
Photonic Microsystems Micro and Nanotechnology Applied to Optical Devices and Systems /
by Solgaard, Olav.
Published 2009
“...MEMS Reference Shelf,...”
Get full text
eBook
5
RF MEMS Switches and Integrated Switching Circuits /
by Liu, Ai-Qun.
Published 2010
“...MEMS Reference Shelf,...”
eBook
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