Semiconductor manufacturing technology /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Hackensack, New Jersey ; London :
World Scientific,
2008.
|
| Series: | Advanced series in electrical and computer engineering
Vol. 13 |
| Subjects: |
| Physical Description: | 470 páginas : ilustraciones, diagramas. |
|---|---|
| Bibliography: | Referencias bibliográficas |
| ISBN: | 9789812568236 9812568239 |