A practical guide to optical metrology for thin films /
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| Format: | Book |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH Verlag GmbH & Co.,
2013.
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| Subjects: |
| Physical Description: | 211 páginas : ilustraciones, diagramas, gráficas, tablas. |
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| Bibliography: | Referencias bibliográficas |
| ISBN: | 9783527411672 |