Temperature Measurement during Millisecond Annealing : Ripple Pyrometry for Flash Lamp Annealers /
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| Autor Corporativo: | |
| Formato: | eBook |
| Lenguaje: | English |
| Publicado: |
Wiesbaden :
Springer Fachmedien Wiesbaden : Imprint: Springer,
2015.
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| Edición: | 1st ed. 2015. |
| Colección: | MatWerk,
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| Materias: |
Tabla de Contenidos:
- Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing
- Concept of ripple pyrometry during flash lamp annealing
- Ripple pyrometry for flash lamp annealing.- Experiments – ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.