Temperature Measurement during Millisecond Annealing : Ripple Pyrometry for Flash Lamp Annealers /

Bibliographic Details
Main Author: Reichel, Denise. (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Wiesbaden : Springer Fachmedien Wiesbaden : Imprint: Springer, 2015.
Edition:1st ed. 2015.
Series:MatWerk,
Subjects:
Table of Contents:
  • Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing
  • Concept of ripple pyrometry during  flash lamp annealing
  •  Ripple pyrometry for flash lamp annealing.- Experiments - ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.