Surface Tension in Microsystems : Engineering Below the Capillary Length /
Corporate Author: | |
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Other Authors: | |
Format: | eBook |
Language: | English |
Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2013.
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Edition: | 1st ed. 2013. |
Series: | Microtechnology and MEMS,
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Subjects: |
Physical Description: | XXIX, 327 p. 174 illus., 42 illus. in color. : online resource. |
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ISBN: | 9783642375521 |