MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness /
| Main Authors: | , |
|---|---|
| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
New York, NY :
Springer US : Imprint: Springer,
2009.
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| Edition: | 1st ed. 2009. |
| Series: | MEMS Reference Shelf,
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| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-0-387-09536-3 |
Table of Contents:
- Fundamentals of Micromachined Vibratory Gyroscopes
- Fundamentals of Micromachined Gyroscopes
- Fabrication Technologies
- Mechanical Design of MEMS Gyroscopes
- Electrical Design of MEMS Gyroscopes
- Structural Approaches to Improve Robustness
- Linear Multi DOF Architecture
- Torsional Multi DOF Architecture
- Distributed Mass Architecture
- Conclusions and Future Trends.