MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness /
Autores principales: | , |
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Autor Corporativo: | |
Formato: | eBook |
Lenguaje: | English |
Publicado: |
New York, NY :
Springer US : Imprint: Springer,
2009.
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Edición: | 1st ed. 2009. |
Colección: | MEMS Reference Shelf,
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Materias: | |
Acceso en línea: | https://doi.org/10.1007/978-0-387-09536-3 |
Tabla de Contenidos:
- Fundamentals of Micromachined Vibratory Gyroscopes
- Fundamentals of Micromachined Gyroscopes
- Fabrication Technologies
- Mechanical Design of MEMS Gyroscopes
- Electrical Design of MEMS Gyroscopes
- Structural Approaches to Improve Robustness
- Linear Multi DOF Architecture
- Torsional Multi DOF Architecture
- Distributed Mass Architecture
- Conclusions and Future Trends.