MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness /

MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness /

Detalles Bibliográficos
Autores principales: Acar, Cenk. (Autor), Shkel, Andrei. (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: eBook
Lenguaje:English
Publicado: New York, NY : Springer US : Imprint: Springer, 2009.
Edición:1st ed. 2009.
Colección:MEMS Reference Shelf,
Materias:
Electronics.
Microelectronics.
Electronic circuits.
Automotive engineering.
Mechanical engineering.
Electronics and Microelectronics, Instrumentation.
Circuits and Systems.
Automotive Engineering.
Mechanical Engineering.
Acceso en línea:https://doi.org/10.1007/978-0-387-09536-3
Tabla de Contenidos:
  • Fundamentals of Micromachined Vibratory Gyroscopes
  • Fundamentals of Micromachined Gyroscopes
  • Fabrication Technologies
  • Mechanical Design of MEMS Gyroscopes
  • Electrical Design of MEMS Gyroscopes
  • Structural Approaches to Improve Robustness
  • Linear Multi DOF Architecture
  • Torsional Multi DOF Architecture
  • Distributed Mass Architecture
  • Conclusions and Future Trends.

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