Nanofabrication Principles, Capabilities and Limits /
Main Author: | |
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Corporate Author: | |
Format: | eBook |
Language: | English |
Published: |
New York, NY :
Springer US : Imprint: Springer,
2008.
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Edition: | 1st ed. 2008. |
Subjects: | |
Online Access: | https://doi.org/10.1007/978-0-387-75577-9 |
Physical Description: | XIV, 343 p. 177 illus. online resource. |
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ISBN: | 9780387755779 |