SpringerLink (Online service), Depla, D., & Mahieu, S. (2008). Reactive Sputter Deposition (1st ed. 2008.). Berlin, Heidelberg: Springer Berlin Heidelberg : Imprint: Springer.
Chicago Style CitationSpringerLink (Online service), Diederik Depla, and Stijn Mahieu. Reactive Sputter Deposition. 1st ed. 2008. Berlin, Heidelberg: Springer Berlin Heidelberg : Imprint: Springer, 2008.
MLA CitationSpringerLink (Online service), Diederik Depla, and Stijn Mahieu. Reactive Sputter Deposition. 1st ed. 2008. Berlin, Heidelberg: Springer Berlin Heidelberg : Imprint: Springer, 2008.
Warning: These citations may not always be 100% accurate.