Reactive Sputter Deposition
| Corporate Author: | |
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| Other Authors: | , | 
| Format: | eBook | 
| Language: | English | 
| Published: | Berlin, Heidelberg :
        Springer Berlin Heidelberg : Imprint: Springer,
    
      2008. | 
| Edition: | 1st ed. 2008. | 
| Series: | Springer Series in Materials Science,
              109 | 
| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-3-540-76664-3 | 
Internet
https://doi.org/10.1007/978-3-540-76664-3Sistema de Bibliotecas del Tecnológico de Costa Rica
| Copy | Available | 
|---|