Steigerwald, J. M., Murarka, S. P., & Gutmann, R. J. (1997). Chemical mechanical planarization of microelectronic materials. New York: John Wiley.
Chicago Style CitationSteigerwald, Joseph M., Shyam P. Murarka, and Ronald J. Gutmann. Chemical Mechanical Planarization of Microelectronic Materials. New York: John Wiley, 1997.
MLA CitationSteigerwald, Joseph M., Shyam P. Murarka, and Ronald J. Gutmann. Chemical Mechanical Planarization of Microelectronic Materials. New York: John Wiley, 1997.
Warning: These citations may not always be 100% accurate.