Cita APA

Powell, R. A., & Rossnagel, S. M. (1999). PVD for microelectronics: Sputter deposition applied to semiconductor manufacturing. San Diego: Academic Press.

Citación estilo Chicago

Powell, Ronald A., y Stephen M. Rossnagel. PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing. San Diego: Academic Press, 1999.

Cita MLA

Powell, Ronald A., y Stephen M. Rossnagel. PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing. San Diego: Academic Press, 1999.