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|a 0841214751
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| 040 |
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|a Sistema de Bibliotecas USAC
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| 041 |
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|a eng.
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| 082 |
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|a 621.381
|b M626m
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| 099 |
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|a 621.381 M626m
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| 245 |
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|a Microelectronics processing :
|b chemical engineering aspects /
|c ed. Dennis W. Hessr. --
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| 260 |
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|a Washington, DC :
|b American Chemical Society,
|c 1989.
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| 300 |
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|a xiv, 547 p. :
|b ill. ;
|c 24 cm.
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| 440 |
|
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|a Advances in chemistry series,
|x 0065-2393 ;
|v 221
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| 504 |
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|a Includes bibliographical references.
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| 650 |
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|a Microelectrónica
|v Materiales
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| 650 |
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|a Circuitos integrados
|x Diseño y construcción
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| 650 |
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|a Química de superficies
|