Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines /

Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines /

Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Lang, Jeffrey. (Editor)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 2010.
Edition:1st ed. 2010.
Series:MEMS Reference Shelf,
Subjects:
Electronics.
Microelectronics.
Energy systems.
Electronic circuits.
Electrical engineering.
Energy.
Electronics and Microelectronics, Instrumentation.
Energy Systems.
Circuits and Systems.
Electrical Engineering.
Energy, general.
Description
Physical Description:XVI, 456 p. 302 illus. : online resource.
ISBN:9780387777474

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