Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines /

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Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines /

Detalles Bibliográficos
Autor Corporativo:	SpringerLink (Online service)
Otros Autores:	Lang, Jeffrey. (Editor )
Formato:	eBook
Lenguaje:	English
Publicado:	New York, NY : Springer US : Imprint: Springer, 2010.
Edición:	1st ed. 2010.
Colección:	MEMS Reference Shelf,
Materias:	Electronics. Microelectronics. Energy systems. Electronic circuits. Electrical engineering. Energy. Electronics and Microelectronics, Instrumentation. Energy Systems. Circuits and Systems. Electrical Engineering. Energy, general.

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