Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines /
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| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
New York, NY :
Springer US : Imprint: Springer,
2010.
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| Edition: | 1st ed. 2010. |
| Series: | MEMS Reference Shelf,
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| Subjects: |
Table of Contents:
- to PowerMEMS
- System Design Considerations and Device Overview
- Materials, Structures and Packaging
- Microengine Fabrication
- Fabrication of Microscale Rotating Magnetic Machines
- High-Speed Gas Bearings for Micro-Turbomachinery
- Thermofluidics and Turbomachinery
- Motors and Generators
- Microcombustors for Rotating Machinery.