Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines /
| Autor Corporativo: | |
|---|---|
| Otros Autores: | |
| Formato: | eBook |
| Lenguaje: | English |
| Publicado: |
New York, NY :
Springer US : Imprint: Springer,
2010.
|
| Edición: | 1st ed. 2010. |
| Colección: | MEMS Reference Shelf,
|
| Materias: |
Tabla de Contenidos:
- to PowerMEMS
- System Design Considerations and Device Overview
- Materials, Structures and Packaging
- Microengine Fabrication
- Fabrication of Microscale Rotating Magnetic Machines
- High-Speed Gas Bearings for Micro-Turbomachinery
- Thermofluidics and Turbomachinery
- Motors and Generators
- Microcombustors for Rotating Machinery.