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01539nam a22003495i 4500 |
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20210909133513.0 |
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cr nn 008mamaa |
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120827s2013 gw | s |||| 0|eng d |
| 020 |
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|a 9783642317767
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| 024 |
7 |
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|a 10.1007/978-3-642-31776-7
|2 doi
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| 040 |
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|a Sistema de Bibliotecas del Tecnológico de Costa Rica
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| 100 |
1 |
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|a Zhang, Yafei.
|e author.
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| 245 |
1 |
0 |
|a Multilayer Integrated Film Bulk Acoustic Resonators /
|c by Yafei Zhang, Da Chen.
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| 250 |
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|a 1st ed. 2013.
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| 260 |
# |
# |
|a Berlin, Heidelberg :
|b Springer Berlin Heidelberg :
|b Imprint: Springer,
|c 2013.
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| 300 |
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|a X, 154 p. :
|b online resource.
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| 336 |
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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| 505 |
0 |
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|a Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR.
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| 650 |
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0 |
|a Nanotechnology.
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| 650 |
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0 |
|a Materials—Surfaces.
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| 650 |
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0 |
|a Thin films.
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| 650 |
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0 |
|a Solid state physics.
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| 650 |
1 |
4 |
|a Nanotechnology and Microengineering.
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| 650 |
2 |
4 |
|a Surfaces and Interfaces, Thin Films.
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| 650 |
2 |
4 |
|a Solid State Physics.
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| 700 |
1 |
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|a Chen, Da.
|e author.
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| 710 |
2 |
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|a SpringerLink (Online service)
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| 773 |
0 |
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|t Springer eBooks
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| 900 |
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|a Libro descargado a ALEPH en bloque (proveniente de proveedor)
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