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120827s2013 gw | s |||| 0|eng d |
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|a 9783642317767
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|a 10.1007/978-3-642-31776-7
|2 doi
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|a Sistema de Bibliotecas del Tecnológico de Costa Rica
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|a Zhang, Yafei.
|e author.
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|a Multilayer Integrated Film Bulk Acoustic Resonators /
|c by Yafei Zhang, Da Chen.
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|a 1st ed. 2013.
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|a Berlin, Heidelberg :
|b Springer Berlin Heidelberg :
|b Imprint: Springer,
|c 2013.
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|a X, 154 p. :
|b online resource.
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|a text
|b txt
|2 rdacontent
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|a computer
|b c
|2 rdamedia
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|a online resource
|b cr
|2 rdacarrier
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|a Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR.
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|a Nanotechnology.
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|a Materials—Surfaces.
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|a Thin films.
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|a Solid state physics.
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|a Nanotechnology and Microengineering.
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|a Surfaces and Interfaces, Thin Films.
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|a Solid State Physics.
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|a Chen, Da.
|e author.
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|a SpringerLink (Online service)
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|t Springer eBooks
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|a Libro descargado a ALEPH en bloque (proveniente de proveedor)
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