Multilayer Integrated Film Bulk Acoustic Resonators /

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Multilayer Integrated Film Bulk Acoustic Resonators /

Bibliographic Details
Main Authors:	Zhang, Yafei. (Author), Chen, Da. (Author)
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
Edition:	1st ed. 2013.
Subjects:	Nanotechnology. Materials-Surfaces. Thin films. Solid state physics. Nanotechnology and Microengineering. Surfaces and Interfaces, Thin Films. Solid State Physics.

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