Multilayer Integrated Film Bulk Acoustic Resonators /
| Main Authors: | , |
|---|---|
| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2013.
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| Edition: | 1st ed. 2013. |
| Subjects: |
Table of Contents:
- Introduction
- Propagation of Acoustic Wave in Crystals
- The Theory of FBAR
- The Sputtering Deposition and Etching of AlN Film
- The Membrane Structured FBAR
- Solidly Mounted Acoustic Resonator
- The Application of FBAR in RF Filters
- The FBAR Excited by Lateral Filed
- High Sensitive Sensors Based on FBAR.