Thermal Transport for Applications in Micro/Nanomachining
| Main Authors: | , |
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2008.
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| Edition: | 1st ed. 2008. |
| Series: | Microtechnology and MEMS,
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| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-3-540-73607-3 |