Gettering and defect engineering in semiconductor technology : gadest '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt (Oder), Germany october 19-14, 1993 /
Autor principal: | Grimmeiss, H.G. (Editor ) |
---|---|
Otros Autores: | Kittler, M. (Editor , Editor/a), Richter, H. (Editor , Editor/a) |
Formato: | Libro |
Lenguaje: | English |
Publicado: |
Suiza :
Scitec,
c1993.
|
Colección: | Solid State Phenomena ;
32-33) |
Materias: |
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