Gettering and defect engineering in semiconductor technology : gadest '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt (Oder), Germany october 19-14, 1993 /
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| Otros Autores: | , |
| Formato: | Libro |
| Lenguaje: | English |
| Publicado: |
Suiza :
Scitec,
c1993.
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| Colección: | Solid State Phenomena ;
32-33) |
| Materias: |