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20080825163752.0 |
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080812s1994 xxu ||||| eng |
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|a 0841228485
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|a 9114633
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|a Sistema de Bibliotecas del Universidad de Costa Rica
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0 |
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|a eng
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| 082 |
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|a 621.381.531
|b I61i2
|2 22
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| 100 |
1 |
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|a Thompson, Larry F.
|e Editor/a
|4 edt
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| 245 |
1 |
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|a Introduction to microlithography /
|c edited by Larry F. Thompson, C Grant Willson, Murrae J. Bowden
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| 250 |
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|a 2. edition
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| 260 |
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|a Washington, D.C. :
|b American Chemical Society,
|c 1994.
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| 300 |
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|a xiv, 527 páginas :
|b ilustraciones
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| 490 |
0 |
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|a ACS Professional reference book
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| 650 |
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|a LITOGRAFIA
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| 650 |
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|a INGENIERIA
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| 650 |
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|a MICROELECTRONICA
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| 650 |
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|v CONGRESOS
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| 650 |
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|a SEMICONDUCTORES
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| 650 |
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|x DISEÑO Y CONSTRUCCION
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| 650 |
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|a CIRCUITOS IMPRESOS
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| 700 |
1 |
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|a Willson, C. Grant
|e Editor/a
|4 edt
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| 700 |
1 |
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|a Bowden, Murrae J.
|e Editor/a
|4 edt
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| 900 |
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|a 2008
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| 912 |
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|a 25-AUG-2008 - SANCHEZ VELASQUEZ, AURA
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| 917 |
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|a 12-AUG-2008 - ALVARADO MONGE, KATTIA YENORY
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| 949 |
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|a ASV -ASV
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| 916 |
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|a Centro Catalográfico
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