Microlithography /
| Autor principal: | |
|---|---|
| Formato: | Libro |
| Lenguaje: | Undetermined |
| LEADER | 00599nam a2200169uu 4500 | ||
|---|---|---|---|
| 001 | 000224772 | ||
| 005 | 20101209093524.0 | ||
| 008 | 101029 ||||| und | ||
| 020 | |a 0819423785 | ||
| 035 | |a 9277336 | ||
| 040 | |a Sistema de Bibliotecas de la Universidad de Costa Rica | ||
| 082 | 0 | |a 670.42 |b H236h |2 22 | |
| 100 | 1 | |a Rai-Choudhury, Prosenjit |e Editor/a |4 edt | |
| 245 | 1 | 0 | |a Microlithography / |c P. Rai-Choudhury, editor |
| 773 | 0 | |7 nnam |t Handbook of microlithography, micromachining, and microfabrication | |
| 912 | |a 09-DEC-2010 - BERMUDEZ RUIZ, AURORA | ||
| 917 | |a 29-OCT-2010 - BUSTAMANTE MORA, CYNTHIA | ||