Microelectronics processing : inorganic materials characterization /
| Formato: | Libro |
|---|---|
| Publicado: |
Washington, DC :
American Chemical Society,
1986.
|
| Colección: | ACS symposium series,
295 |
| Materias: |
| Descripción Física: | x, 443 p. : ill. ; 24 cm. |
|---|---|
| Bibliografía: | Includes bibliographies and indexes. |
| ISBN: | 0841209340 |
| ISSN: | 0097-6156 ; |