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00740pam a20001694504500 |
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499292 |
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|a 0841209340
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| 040 |
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|a Sistema de Bibliotecas USAC
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| 041 |
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|a eng.
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| 082 |
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|a 621.381
|b M626
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| 099 |
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|a 621.381 M626
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| 245 |
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|a Microelectronics processing :
|b inorganic materials characterization /
|c Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society. --
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| 260 |
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|a Washington, DC :
|b American Chemical Society,
|c 1986.
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| 300 |
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|a x, 443 p. :
|b ill. ;
|c 24 cm.
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| 440 |
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|a ACS symposium series,
|x 0097-6156 ;
|v 295
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| 504 |
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|a Includes bibliographies and indexes.
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| 650 |
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|a Microelectrónica
|x Materiales
|v Congresos, conferencias, etc.
|